半导体级异丙醇的制备与检测

Preparation and detection of semiconductor grade isopropyl alcohol

随着芯片制造工艺的迅速发展和化学机械研磨技术的推广,芯片(特别是存储芯片)的堆叠层数急剧增加,对清洗和干燥的要求越来越高。异丙醇作为清洗颗粒和干燥水分的重要溶剂之一,对其性能要求也随着半导体制造工艺的发展越来越高。研究和开发高性能异丙醇成为了产业界的重要课题之一。本文介绍了工业级异丙醇的合成、半导体级异丙醇的提纯以及提纯后产品的检测。提纯主要采用精馏、重整、纳滤、离子交换等方法。最终得到的产品经检测后产品的性能优于SEMI TierD标准。

With the rapid development of chip manufacturing technology and the promotion of chemical mechanical grinding technology,the number of stacked layers of chips(especially memory chips)has increased dramatically,and the requirements for cleaning and drying have become increasingly high.As one of the important solvents for cleaning particles and drying water,isopropanol has higher performance requirements with the development of semiconductor manufacturing technology.Research and development of highperformance isopropanol has become one of the important topics in the industry.This paper introduces the synthesis of industrial grade isopropanol,the purification of semiconductor grade isopropanol and the detection of purified products.Purification mainly adopts distillation,reforming,nanofiltration,ion exchange and other methods.The performance of the final product after testing is superior to the SEMI TierD standard.