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精密定位技术研究 被引量:49

Study on precision positioning technique
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摘要 精密定位技术广泛应用于精密仪器、机械和机床I、C工艺制造、计算机外围设备。其特点是精度和分辨率高,台面尺寸从小到大,品种繁多,大多有自动化操作要求,需要集成许多高性能高品质机械零部件,高分辨力检测元器件,因此制作难度大,投资大。过去精密定位的精度和分辨率已从毫米量级过渡到了微米、从亚微米进入到了纳米量级。本文概述了获取高精度定位精度的支撑关键技术。介绍了基于宏微二级叠加方式的控制系统,研制的宏动工作台用精密滚珠丝杠螺母传动,由交流伺服驱动器驱动,配备反射式光栅检测元件,构成伺服反馈系统,并对其实际误差曲线进行线性补偿之后,可将定位误差从76μm降低到3μm;再在宏动工作台面上安装高精度的微动载物台,由计算机进行宏微切换,从宏运动过渡到微运动方式,可实现大行程纳米量级精密定位。 Precision positioning technique is widely used in precision instrument,machine tools,IC technique and peripheral equipments of computer.It has the advantages of high precision and high resolution.But for the dimensions of the stages vary from very small to large and the demand of automatic operation,it is difficult to manufacture and it costs high to integrate many high-quality parts and high-resolution inspectors.In the past years,the precision and resolution already advanced from millimeter to micrometer from semi-micrometer to nanometer.This paper introduces the key techniques used for getting high precision and resolution.A control system based on macro-micro dual loop method is represented,in which a macro stage is driven by ball screw and AC servo motor with metal reflect grating inspector to comprise servo control system.The linear compensation to the real error curve can reduce the position error from 76 μm to 3 μm.A novel micro stage holds on the macro stage's upper surface.The detected error signal from macro loop will be changed to micro loop and can fulfill large stroke with nano precision positioning.
出处 《光学精密工程》 EI CAS CSCD 北大核心 2005年第z1期69-75,共7页 Optics and Precision Engineering
基金 国家高科技863基金项目(No.2002AA404450) 上海大学"先进制造与自动化211工程"重点学科资助
关键词 精密定位 分辨率 宏运动 微运动 纳米 precision positioning resolution macro movement micro movement nanometer
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参考文献2

  • 1[1]MAO J H,HIROYUKI T.Precision positioning of a DC-motor-driven aerostatic slide system[J].Precision Engineering,2003,27:32-41.
  • 2[2]HEUI J P,SUNG L D.Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation[J].International Journal of Machine Tools & Manufacture,2001,41:51-63.

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