磁头表面超薄DLC保护层厚度测量研究

Investigation on Thickness of Ultra-thin Carbon Protective Coatings on Slider Surface

研究了测量磁头表面超薄DLC薄膜和Si中间层厚度的方法,所用的设备有:AES,XPS,TEM。研究结果显示,XPS和AES测量的结果较为吻合,TEM的结果则存在较大差异。在TEM高分辩像下无法分清DLC和Si层,并对AES,XPS和TEM结果产生差异的原因进行了分析。

Methods of measuring the thickness of ultra-thin DLC film and Si interlayer were investigated by AES,XPS,TEM in present paper.The results of XPS and AES are consistent,but a discrepancy existed between them with TEM.Clearing interface of DLC and Si layers can't be observed in HRTEM image.Furthermore,what led the different measured thickness among above three methods were investigated.