摘要蒙特卡罗(Monte Carlo,MC)和分子动力学是模拟薄膜生长的两种基本方法.本文结合各种PVD技术的工艺特点,介绍了薄膜生长的Monte Carlo模拟.详尽地总结了载能粒子沉积薄膜生长的Kinetic Monte Carlo模型和算法.最后指出建立精细的模型、算法并适当应用分子动力学是提高模拟可靠性的方法.
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