NH_4^+敏传感器的研制及初步应用

Design of NH_4^+sensitive urea sensor with reinforced ISFET

目的 结合平面半导体技术及生物化学原理 ,制作NH+4敏感的尿素传感器 ,并对其检测性能进行评价。方法 采用平面半导体技术制作ISFET ,在栅上固化脲酶得到NH+ 4敏尿素传感器 ,并在ISFET自身稳定性、传感器响应时间、检测范围及保存时间几个方面对该传感器进行评价。结果 ISFET自身性能较稳定 ,传感器响应时间 <60s ,尿素检测范围为 10～ 10 0 0mg L ,保存 7d内该传感器检测性能较稳定。

Objective To fabricate the NH + 4 sensitive urea sensor with reinforced ion sensitive field effect transistor (ISFET) using the plane semiconductor technique with biochemical theory, and to evaluation its detecting function. Methods The ISFET was obtained using the plane semiconductor technique, and then urease was solidified on the gate of ISFET. The self stability of ISFET, the response time, the detected range, and the effect of preservation time of the sensor were tested. Results The stability of ISFET was fine. As for the sensor, the response time was less than 60 s; the detected range of urea was 10-1 000 mg/L; and the detecting function was stable within 7 d. Conclusion The urea sensor fabricated in our experiment has some practical values of application.