摘要
用50W连续波CO_2激光器为热源,诱发SiH_4和C_2H_4反应,合成SiC超细粉末。实验确定了反应腔体内压力p、气源中的C/Si原子比、喷嘴内径2r以及激光功率密度与粉末特性之间的关系,并对合成的产物进行物理、化学表征。
Research results on synthesis of ultrafine SiC powder from gas-phase chemical reactions of SiH_4 and C_2H_4 induced by 50W CW CO_2 laser are presented. The relations between quality of the powder and cell pressure, C/Si atomic ratio in gas mixture,inner diameter of the nozzle and laser intensity are determined. The collected powder has been characterized physically and analyzed chemically.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
1993年第1期33-37,共5页
Journal of The Chinese Ceramic Society
关键词
激光
碳化硅
超细粉末
laser
gas-phase chemical reaction
silicon carbide
ultrafine powder