类金刚石薄膜的摩擦学特性及磨损机制研究进展

Review on Tribological Properties and Wear Mechanisms of Diamond-like Carbon Films

类金刚石薄膜已显示了重要的摩擦学应用价值 ,其中化学气相沉积的类金刚石薄膜 (DLC)具有膜层致密、厚度均匀、摩擦学性能优良等特点成为广泛采用的一种沉积方法。本文介绍了气源成分、基体材料、摩擦环境、摩擦对偶、载荷及速度对化学气相沉积制备类金刚石薄膜的摩擦学特性的影响 ,概述了其摩擦磨损机理 ,同时探讨了进一步研究工作的方向。

Diamond-like carbon films showed important value of tribological application. The films produced by Chemical Vapor Deposition(CVD) had uniform thickness, excellent tribological properties and so on. In this paper, we reviewed the role of gas source chemistry, matrix materials, environments, mating materials,loads and sliding speeds in the tribological properties of Diamond-like Carbon films produced by Chemical Vapor Deposition (CVD), the wear and friction mechanisms are also summarized. Meanwhile, the future research directions are discussed.