摘要
微电子机械系统 (MEMS)是一种新兴技术 ,它几乎影响着每一个科学技术领域 ,如交通、无线通信、航天、化学以及光波系统。目前许多工业领域期待选用微电子机械系统来解决技术上的问题。简述了微电子机械系统技术的基础概念、所用材料、加工工艺等 ;并重点综述了该技术在光纤通信系统中的广泛应用。
As a rising technology,MEMS(Micro Electro Mechanical System)has almost influenced each scientific field,such as traffic system,wireless communication,aviation,chemistry,and light-wave system.And nowadays,much question in industrial field perhaps can be solved by MEMS technology.First,simply introduces basic concept,materials,fabrication technology about MEMS.Then,wide application of MEMS technology in fiber communication system is discussed chiefly.
出处
《现代制造工程》
CSCD
北大核心
2004年第12期119-121,共3页
Modern Manufacturing Engineering
