摘要
将一种基于多元统计方法的因子分析法用于俄歇深度剖面分析,采用Ar^+离子轰击Ta_2O_5/Ta样品,俄歇峰采用具有高表面灵敏度和化学态灵敏的NOO俄歇跃迁,用因子分析可得到Ta的三种可区别的不同化学态即Ta、Ta_2O_5和Ta_xO_y,并且能提高探测灵敏度。
Factor analysis of Auger spectra acquired during sputter depth profiling of Ta_2O_5/Ta has been adopted in our laboratory. The results obtained from chemical-state-sensitive Auger NOO transition show that there are three distinguishable components of Ta signal with different chemical states, i. e. , Ta, Ta_2O_5 and Ta_xO_y existed and that the detection limit is also improved.
出处
《真空科学与技术》
CSCD
1993年第1期13-20,共8页
Vacuum Science and Technology
基金
国家教委高校博士点基金
关键词
俄歇电子谱法
氧化钽
钽
因子分析
Factor analysis, Statistical method, Auger electron spectroscopy, Depth profile, Chemical states