摘要
介绍了光电高精度全场形位检测系统。系统以面阵CCD作为被测物体边缘图象的探测器件,应用激光衍射和囹象处理技术进杆被测物体边缘的精确定位,实现了高精度全场形位检测。该系统具有测量速度快,检测精度高及数据处理自动化等特点。
The optoelectric meating system for the field of chare and position with high ptecisionis described in this paper. The mcasuring system, using a plane scanning, the technique of laserdiffraction, and image processing, can realizes the msoement of the field of shape and position withhigh precision. It passesses the advantages of high precision and fast on-line measurement. It can also handle the data automatically.
出处
《光学仪器》
1994年第4期13-18,共6页
Optical Instruments
关键词
全场形位
激光
衍射
CCD
光电检测
Field of Shape and Position, Laser,Diffraction, CCD