摘要
在硬质合金WC—Co基体上,用热丝CVD法,人工合成出金刚石薄膜。利用X衍射、激光拉曼光谱和扫描电镜对金刚石薄膜的结构进行了测定,结果是令人满意的。精确测量金刚石薄膜与基体间的结合力是很困难的。本文报导了金刚石薄膜涂层刀具的实际切削结果,并以此来评估该涂层与基体间的结合力。
Diamond films have been synthesized by hot filament chemical vapordeposition(CVD)method on the WC Co substrate. The crystal structure ofdiamond films are analyzed by X-ray diffraction,laser Raman spectroscopyand scanning electron microscope. The results are satisfactory.It is very difficult to measure the adhesion between the substrate anddiamond film,The paper reports the actual cutting results of diamond-filmcoated tools and evaluates the adhesion between the substrate and coated filmby the results.
出处
《微细加工技术》
1994年第2期58-62,共5页
Microfabrication Technology
基金
国家科委
工业科技司
新材料处资助项目