摘要
研究了直流等离子体激光化学汽相沉积(CVD)法合成金刚石膜的断裂强度。利用压力爆破技术测量了圆形金刚石膜的断裂强度。实验结果表明,断裂强度与金刚石颗粒大小、膜厚度、圆半径、甲烷浓度及衬底温度有密切的依赖关系,并对这些结果进行了讨论。
he fracture strength of Polycrystalline diamond films produced by DC plasma CVD is investigated.The fracture strength of circular diamond film was measured by a burst pressure technique. Experimental results have shown that the fracture strength is considerably dependent on grain size,sample thickness,apertune radius,methane concentration and substrate temperature.The results have also been discu- ssed.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1994年第9期1559-1563,共5页
Acta Physica Sinica