半导体ZnO单晶生长的技术进展

Technical progress on the growth of semiconductor ZnO crystals

ZnO单晶是一种具有半导体、发光、压电、电光、闪烁等性能的多功能晶体材料。近年来,它在紫外光电器件和GaN衬底材料等方面的应用前景而使其成为新的研究热点。本文综述了ZnO单晶助熔剂法、水热法、气相法等生长技术的研究进展,结合ZnO单晶的化学结构,探讨了该晶体的结晶习性及生长技术发展方向。

ZnO is a multi-function crystal with semiconduction, luminescence, piezoelectricity, photoelectricity, and scintillation properties. Now the prospect of its wide applications in uv optoelectronic devices and substrate for the epitaxial growth of GaN have drawn a great attraction. ZnO crystals have been grown by flux, hydrothermal and vapor growth method. The technical progress on the growth of ZnO crystals were reviewed in this paper. The crystallization behavior and the growth techniques of ZnO crystals were discussed from the view point of the crystal chemistry.