模糊策略及软件补偿用于温度控制研究

Fuzzy strategy and software compensation for temperature control

为了解决加热时间和温度过冲的矛盾,把模糊控制策略用于封装加热炉温控制.使用软件补偿方式解决了热电偶测温时冷端补偿时结构复杂、成本高的问题.提出的微功率补偿思想为温度精密控制提供了一条新途径.实验测试结果和样机的实际应用证明模糊控制技术能够有效改善加热性能,微功率补偿思想明显提高了炉温的稳定性.

In order to find a trade-off between the heating duration and temperature overshoot, a fuzzy control strategy is adopted to control the temperature of heating furnace for MEMS device encapsulation process. Instead of complicated and expensive hardware, software compensation for the thermocouple is adopted. A tiny power compensation strategy is proposed to realize high precision temperature control. The experiments and applications using prototype show that the heating process is obviously improved by fuzzy control strategy and the temperature stability is markedly improved by tiny power compensation.