高质量金刚石自支撑膜织构与断裂强度的关系研究

Research on Relationship Between the Texture and Fracture Strength of High Quality Freestanding CVD Diamond Films

利用直流电弧等离子体喷射化学气相沉积在Mo基体上制备了不同织构的金刚石厚膜。用扫描电境(SEM)观察金刚石膜的形貌,用XRD表征晶体取向,用极图和取向分布函数法计算金刚石膜的不同织构,利用三点弯曲法测量金刚石膜的断裂强度。结果表明,金刚石膜的断裂强度随着衍射峰强度比值I(111)/I(220)的增大而不断降低。{110}织构的金刚石膜具有最高的断裂强度。

The different textured CVD diamond films on molybdenum substrate were prepared by DC arc plasma jet system.The morphology of diamond films was observed by SEM and crystal orientations were characterized by XRD.The different textures of CVD diamond films were analyzed using the methods of pole figure and orientation distribution function.The fracture strength of the diamond films was tested by three-point bending method.The results show that the relationship between texture and fracture strength of CVD diamond films was obtained.With the increase of ratio of diffraction peak intensity I_ (111)/I_ (220),the value of fracture strength decreases,and the {110} textured diamond films have the highest fracture strength.