能动薄镜面的有限元分析

Analysis for the Einite Element of the Active Thin Mirror Surface

介绍了我们采用有限元法对能动薄镜面进行计算分析的一些结果：（１）利用“ＡｌｇｏｒＦｅａｓ”有限元软件系统建立了直径厚度比为６２．４：１薄镜面的有限元模型，并利用该模型进行了以下的工作；（２）计算了在重力作用下，不同驱动器支撑数量时薄镜自身的变形量；（３）计算了该镜面在不同的驱动器排布方式下拟合准Ｚｅｒｎｉｋｅ多项式几个低阶象差时薄镜面的应力分布情况和薄镜对不同象差的拟合误差，并从得到的计算数据中分析了薄镜面对象差的拟合误差、驱动器数量和驱动器排布方式之间的关系，以及薄镜的应力分布同驱动器排布方式的关系；（４）计算并得出了薄镜厚度值不同时的应力分布以及厚度对薄镜面拟合象差能力的影响。

In this paper,some results of calculation and analyse for active thin mirror surface by using finite element method are introduced:(1)A thin mirror with an aspect ratio of 62. 4:1 is simulated by a finite element software“Algor Feas”,and the following work are finished with this model.(2)The deformations of the thin mirror supported by different numbers of actuator under the gravity are computer. (3) The stress distribution of the mirror and fitting errors for fitting several low-order Quasi-Zernike polynomials with different actuator arrangements are computed;From the results, the relation between fitting error of the mirror and the arrangement and number of actuator are analysised; (4) The stress distribution and aberration fitting capability of this mirror with different mirror thickness are also analysised.