摘要
利用EPMA和XRD的分析方法,研究了Si_3N_4-Al_2O_3-ZrO_2系陶瓷材料表面氧化层组成。结果表明,Si_3N_4-Al_2O_3-ZrO_2系陶瓷材料表面氧化层是由方石英相、ZrSiO_4相和含有Al_2O_3、CaO等的SiO_2玻璃相所组成,其中SiO_2玻璃相中Al_2O_3、CaO等的含量,随着氧化时间的增加而逐渐增加。
篢he composition of surface oxidation layer Of Si_3N_4-Al_2O_3-ZrO_2 ceramics has been investi-gated with EPMA and XRD. The results indicate that the surface oxidation laver is constituted of cristobalite、ZrSiO_4 and a glass phase containing SiO_2 with impurities such as Al_2O_3 and CaO,The con-tents of these impurities increase with increasing oxidation time.
关键词
氮化硅陶瓷
氧化层
电子探针微区
陶瓷
:Silicon Nitride,Oxidation layer,electron probe microarea analysis.