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用化学气相渗透法制备莫来石陶瓷基复合材料 被引量:2

Mullite Ceramic Composites Fabricated by Chemical Vapor Infiltration
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摘要 研究了A lC l3-S iC l4-H2-CO2气相系统不同温度化学气相沉积(Chem ica l vapor depos ition,CVD)A l2O3-S iO2系氧化物相组成及显微结构,分析了不同温度下气相的渗透效果和550℃沉积产物的相演化。结果表明,1 050℃沉积薄膜由多晶致密-αA l2O3,3A l2O3.2S iO2,少量-δA l2O3,-ιA l2O3和非晶S iO2组成,850℃沉积薄膜由多孔-δA l2O3结合非晶S iO2组成,550℃沉积薄膜由致密-γA l2O3结合非晶S iO2组成。550℃的化学气相渗透(Chem ica lvapor in filtration,CV I)过程有良好的渗透性,可以制备N ex te l 720/A l2O3-S iO2复合材料。进一步研究表明,550℃化学气相沉积出的A l2O3-S iO2复合氧化物经1 350℃热处理可转化为-αA l2O3结合莫来石相。 The composition and microstructures of the Al2O3-SiO2 compound coatings fabricated by the chemical vapor deposition in the AlCl3-SiCl4-H2-CO2 gas system are investigated. The penetrability of the gas phase at different temperatures and the mullitization behavior of the Al2O3-SiO2 coating deposited by CVD at 550℃ are analyzed. The coatings deposited at 550℃, 850℃and 1 050℃ are composed of dense γ-Al2O3-SiO2, pore δ-Al2O3-SiO2, dense α-Al2O3-SiO2 2·SiO2-δ-Al2O3-SiO2-SiO2, respectively. Nextel 720/Al2O3-SiO2 composites can be obtained by CVI at 550℃ because of the good penetrability. The Al2O3-SiO2 matrix can be changed into the mullite matrix by the heat-treatment at 1350℃.
出处 《南京航空航天大学学报》 EI CAS CSCD 北大核心 2005年第5期562-566,共5页 Journal of Nanjing University of Aeronautics & Astronautics
关键词 莫来石 复合材料 化学气相渗透 热处理 mullite composites chemical vapor infiltration heat-treatment
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