摘要
介绍了“1.5~2微米实用型分步重复投影光刻机”用的精密快速定位工件台的设计、结构特点、精度分析、检测及使用情况。工件台由大行程X-Y工件台、微动台(Δx,Δy)和调平微转台(Δz1,Δz2,Δz3,Δθ)组成。同时该工件台利用大行程X-Y工件台粗动兼微动与调平微转台的组合完成了“10∶1分步重复投影光刻机”
The designing,constitution features,accuracy analysis,testing and operating of the precision fast positioning stage for 1.5-2μm practical model wafer stepper are introduced in the paper.The stage consists of large travelling distance X Y stage,microdriving stage (Δ x ,Δ y ) and leveling microrotation stage (Δ z 1,Δ z 2,Δ z 3,Δ θ ).At the same time,the stage use the combination of large travelling distance X Y stage coarse moving,microdriving and levelling microrotating stage to finish the development of 10∶1 wafer stepper.
出处
《光电工程》
CAS
CSCD
1996年第4期65-72,共8页
Opto-Electronic Engineering
基金
国家"七.五"科技攻关项目