Experimental Study on the Surface Modification of Ultra Thin DLC Films

Experimental Study on the Surface Modification of Ultra Thin DLC Films

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摘要 Surface modification of Diamond-like carbon (DLC) films was carried out in order to estimate the reliability of the ultra thin DLC films. The wear resistance, conductivity and mechatronic reliability of the films were studied by contact atomic force microscope (AFM), electric force microscope (EFM) and conductive AFM. The failure mechanism of pits formed and the reason for conductivity changed of DLC films were examined. Surface modification of Diamond-like carbon （DLC） films was carried out in order to estimate the reliability of the ultra thin DLC films. The wear resistance, conductivity and mechatronic reliability of the films were studied by contact atomic force microscope （AFM）, electric force microscope （EFM） and conductive AFM. The failure mechanism of pits formed and the reason for conductivity changed of DLC films were examined.

作者朱守星朱世根

机构地区 School of Mechanical Engineering

出处《Journal of Donghua University(English Edition)》 EI CAS 2005年第3期85-87,共3页 东华大学学报（英文版）

关键词 Atomic force microscope Diamond-like carbon Surface modification Electromechanical coupling 原子力显微镜超薄金刚石薄膜表面改性机电耦合缺陷

分类号 O484 [理学—固体物理]

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Journal of Donghua University(English Edition)

2005年第3期

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Experimental Study on the Surface Modification of Ultra Thin DLC Films

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