微量混合标准气体的容量法简易动态配制研究

A Simple Dynamic Volumetric Method for Preparation of Multi-Component Standard Trace Gas

设计和研制了容量法多元混合标准气体简易动态配气装置,该装置漏率小于1×10-9Pa.m3.s-1,并且具备高精度称量、测温、测压系统。利用该动态配气装置,选用不同大小、不同体积的不锈钢定量环,可以一次稀释制备10-610-4(V/V)浓度范围的不同浓度、不同组分的混合标准气体,解决了微量组分标准气体配制上的困难。分析了容量法制备多元混合标准气体定值的不确定度来源,实验表明不确定度为1%2%。该方法简单、可靠,具有实际应用价值。

A simple apparatus of dynamic volumetric method for preparing the standard gases of multi-component is designed and established. High accuracy gravimetry, thermometer, pressure gauge are installed in the apparatus. The leakage of the apparatus is lower than 1×10^-9Pa·m^3·-1. The standard gases of the multi-component in helium with about 10^-6～10^-4 （V/V） are prepared by sample loops in the form of dynamic volumetric method, and the results indicated that the uncertainty of the standard gases in the range of 1%～2%. The apparatus solves the problem of preparation standard gases with trace multi-component by dilution once. The method is simple and reliable.