设计非球面检测用补偿器应注意的几个问题

Some problems about compensator designing

介绍了补偿法检测非球面的原理,举例说明了在补偿器的设计中应注意事项。在补偿器中的每个面及其球心都不要位于其前面的光学元件组成的光学系统的焦点附近,以避免其反射光在有效干涉场内与参考光干涉,从而影响检测结果;补偿器中入射角大的面尽量前移,以降低公差要求;对补偿器材料的光学均匀性要认真核算以确保最后的检测结果有效。

The principle of testing aspheric surface by compensation method was introduced. Some points that are paid attention to in designing compensator were put forward by examples. Every surface and its center of curvature shouldn＇t be near the focus point of the optics system in front of it. The surface on which exists the biggest incidence angle should be as fronter as it can. The homogeneity of optical glass for compensator should be tested carefully.