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柱状ZnO阵列薄膜的生长及其发光特性 被引量:24

Growth of ZnO microrod array films and their optical properties
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摘要 采用一种设备简单、原料低廉的新型方法,在镀有ZnO先驱薄膜的(0001)蓝宝石上利用水热法制备出了柱状ZnO阵列薄膜.用扫描电镜(SEM),X射线衍射(XRD)对样品的形貌和结构进行了表征,结果显示ZnO薄膜为柱状阵列,基于蓝宝石衬底沿c轴择优生长,且(0004)摇摆曲线半高宽度(FWHM)约为1·8°.此ZnO阵列薄膜具有很强的紫外发射光谱(PL). A novel approach using low-cost and simple-equipment was successfully demonstrated on the growth of ZnO microrod array films. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) has characterized the microstructure of the samples. The results indicate that ZnO microrod array films are hexagonal, highly oriented crystalline array films, grown along c-axis of ZnO on (0001) sapphire substrates. The FWHM is about 1.8° for the (0004) rocking curve of the ZnO films. The photoluminescence spectra of ZnO array films show a strong and narrow peak at 395nm.
出处 《物理学报》 SCIE EI CAS CSCD 北大核心 2006年第3期1398-1401,共4页 Acta Physica Sinica
关键词 柱状ZnO阵列薄膜 水热法 (0001)蓝宝石 PL谱 ZnO microrod array films, hydrothermal growth, (0001) sapphire substrates, photolumescence spectra
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