微驱动器及其驱动原理

Microactuators and Their Application

微机电系统(MEMS)是20世纪80年代在微电子技术的基础上兴起的一门应用技术。其中,微驱动器是微机电系统的重要组成部分。主要介绍了电磁驱动、静电驱动、压电驱动、形状记忆合金(SMA)驱动及热驱动等,介绍了它们各自的优缺点及其应用,对其应用前景进行了简要分析。

The Micro Electro Mechanical Systems （MEMS） is an application technique foundation based on the micro -electronics technical foundation in 1980＇s. Among them,the microactuators are the important part of the MEMS. The paper introduces many kinds of actuating ways including electromagnetic actuator, static electric actuator, piezoelectric actuator, the SAM actuator and heats actuator. What＇ s more, the paper introduces the advantage, weaknesses and special applications of these actuators. And at last, analyses the applications of the microactuators.