离轴二次非球面补偿检验计算机辅助调整技术研究

Research on off-axis conic asphere null testing using computer-aided alignment method

分析了非球面补偿检验过程中由补偿器和镜面支撑结构的失调引入的调整量误差,给出了计算机辅助调整方法。建立了离轴二次非球面补偿检验计算机辅助调整系统的物理数学模型,求解了被检非球面镜的失调方位和量值,利用计算机控制调整架实现了系统辅助调整。建立了实验装置,给出了模拟调整和实际调整结果。经过计算机辅助调整后,被检离轴二次非球面的最终检验结果为0.028λ(RMS)(λ=632.8 nm)。

The misalignment-induced aberrations by corrector and the support of the asphere were analyzed in this paper. A computed-aided alignment method was presented combining the interferometric test with the computer optimization for optical alignment, and a mathematical model was established to determine the misalignment. The simulated and actual experimental results of the alignment show that after four times alignment the test results of the asphere can reach up to 0. 028λ（RMS） （λ= 632.8 nm）.