溶胶-凝胶法制备镍酸镧薄膜的研究

Study on the Preparation of LaNiO_3 Thin Films Using Sol-gel Method

采用溶胶-凝胶(sol-gel)法,使用浓度分别为0.1 mol/L、0.2 mol/L和0.3 mol/L的前驱体溶液,在单晶Si(100)衬底上制备了镍酸镧[LaNiO3](简称LNO)导电薄膜,研究了前驱体溶液浓度对LNO薄膜结构和导电性能的影响.X射线衍射测试表明,三种样品均为纯的钙钛矿相,具有较好的(110)择优取向.原子力显微镜分析显示,用0.2 mol/L前驱体溶液制备的LNO薄膜样品晶粒明显大于0.1 mol/L的样品.采用标准四探针法测试了三种样品的电阻率,当前驱体溶液浓度为0.2 mol/L时,样品电阻率最小,仅为2.08×10-3Ω.cm,具有良好的导电性.

LaNiO3 （LNO） thin films were prepared on Si（100） substrates by a sol-gel method. We investigated the effect of precursor concentration on the structure and the conductivity of LNO films. The XRD results showed that all of the samples were of pure perovskite structure and of high （ 110）-orientation. AFM analysis showed that the crystallite size of the 0.2M-LNO film was biger than 0.1M-LNO film obviously. Among these three samples, the 0.2 M-LNO film displayed the lowest resistivity of 2.08 ×10^3Ω·m cm.