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电化学方法制备铜钴纳米多层膜 被引量:3

Electrodeposition of Cu-Co Multilayer Thin Films
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摘要 采用旋转圆盘电极、双脉冲电位法从单一的含有铜离子和钴离子的镀液中电沉积Cu-Co纳米多层膜、并用TEM.AES和X-射线衍射研究镀层的形貌和组成。结果表明:多层膜结构为纯铜和含有少量铜的铜钴合金层交替组成,铜在钴层中的含量,随镀液中的铜含量的增大和转速的提高而提高。 A method has been developed to produce Cu-Co Multilayer from a single electrolyte by electredeposition. The effects of the concentration of copper ions,current density and the speed of rotation were investigated,and the Cu-Co electrodeposition films were analysed by TEM. AES and X-ray diffraction.The results indicated that the film was alternating pure copper and coppercobalt alloy layers. If the content of copper in cobalt layer is to be small,the concentration of its ions in solution must be small and the rotation speed must be low.
出处 《电化学》 CAS CSCD 1996年第3期274-284,共11页 Journal of Electrochemistry
基金 冶金部腐蚀与磨损开放实验室资助
关键词 电沉积 铜钴合金 钠米镀层 多层膜 镀液 Electro-deposition,Copper-Cobalt alloy,Multilayer
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  • 1田民波,薄膜科学与技术手册.下,1991年

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