2.5Gb/s混合集成光发射机

2.5Gb/s Mixed-Integrated Optical Transmitters

介绍了适用于光纤通信系统且具有完全自主知识产权的混合集成光发射机的研制.该发射机采用薄膜电路和激光焊接耦合技术将高速集成电路和光电子器件进行混合集成,其中高速集成电路是采用0.35μm硅CMOS工艺实现的单片4∶1复接器加激光驱动器芯片,光电子器件是采用湿法腐蚀、聚合物平坦和lift-off等技术实现的激光器芯片,最终混合集成模块采用蝶形管壳进行封装,体积小、性能优良.该发射机工作速率为2.5Gb/s,波长为1550nm,输出光功率为5.5dBm,消光比为9.4dB.

A transmitter for fiber optical communication is realized using hybrid integration technology. The laser diode and the chip of the laser diode driver and the 4 ： 1 multiplexer,which are realized in different materials and processes,are fabricated on one same ceramic substrate using a film circuit to make up one opto-electronic integrated circuit,i, e. ,an OEIC. The chip and the diode are realized with a 0. 35μm CMOS process and with wet etching, polymer planar, and lift-off technologies, respectively. The module is encapsulated with a wing shell. Some parameters of the transmitter are summed as follows： bit rate： 2.5GB/s, wave length ： 1550nm, output optical power .- 5. 5dBm, extraction ratio： 9.4dB.