摘要
研究了热丝CVD系统中灯丝形变引起的金刚石薄膜厚度的不均匀性,指出其根源在于灯丝形变使得基底表面温度不均匀,使各处的生长率不一样。并基于一简单模型分析了基底各处生长率与灯丝形变的关系。
Non uniformity of the thickness of diamond thin films caused by filament deformation was studied.It was found that filament deformation resulted in the substrate temperature non uniform,which led to different growth rate in different position of the substrate.Using a simplified model,the relationship between the distribution of the substrate temperature and the deformation of filament was obtained,and on the basis of the dependence of growth rate on substrate temperature,the experimental results can be explained.
出处
《人工晶体学报》
EI
CAS
CSCD
1996年第4期339-342,共4页
Journal of Synthetic Crystals
关键词
金刚石薄膜
化学气相沉积
灯丝
形变
diamond thin films
filament deformation
chemical vapor deposition
substrate temperature
growth rate