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灯丝形变对金刚石薄膜沉积的影响 被引量:2

Influence of Filament Deformation on Deposition of Diamond Thin Films
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摘要 研究了热丝CVD系统中灯丝形变引起的金刚石薄膜厚度的不均匀性,指出其根源在于灯丝形变使得基底表面温度不均匀,使各处的生长率不一样。并基于一简单模型分析了基底各处生长率与灯丝形变的关系。 Non uniformity of the thickness of diamond thin films caused by filament deformation was studied.It was found that filament deformation resulted in the substrate temperature non uniform,which led to different growth rate in different position of the substrate.Using a simplified model,the relationship between the distribution of the substrate temperature and the deformation of filament was obtained,and on the basis of the dependence of growth rate on substrate temperature,the experimental results can be explained.
出处 《人工晶体学报》 EI CAS CSCD 1996年第4期339-342,共4页 Journal of Synthetic Crystals
关键词 金刚石薄膜 化学气相沉积 灯丝 形变 diamond thin films filament deformation chemical vapor deposition substrate temperature growth rate
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  • 1王秀琼,物理,1987年,16卷,617页

同被引文献26

  • 1孙心瑗,周灵平,李宇农,余晓光.热丝CVD法沉积金刚石薄膜用灯丝研究现状及改进[J].粉末冶金工业,2005,15(6):26-32. 被引量:6
  • 2李惠琪,钟国仿,吕反修,杨让.DC PJ-CVD等离子体炬通道中的电弧行为[J].北京科技大学学报,1994,16(6):547-550. 被引量:8
  • 3薛宏国,孙方宏,马玉平,陈明.高性能超细晶粒金刚石涂层刀具制备及试验研究[J].人工晶体学报,2006,35(6):1251-1256. 被引量:7
  • 4[1]Matsumoto S, Sato Y, Kamo M, et al. Vapor deposition of diamond particles from methane [J ]. Japanese journal of Applied Physics, 1982,21 (4): L183-L185.
  • 5[2]May P W. Diamond thin films:a 21st- century Material [J]. Phil Trans Soc A 2000,358: 473-495.
  • 6[3]Jubber M G, Wilson J I, Drummond I, et al. Microwave plasma CVD of high purity diamond films [ J ]. Diamond and Related Materials, 1993,2(4-6) :402-406.
  • 7[5]Hirose Y,Amanuma S,Komaki K.The synthesis of high -quality diamond in combustion flames[J].Journal of Applied Physics,1990,68(25):6401-6405.
  • 8[8]Zeiler E, Schwarz S. Rosiwal S M, et al. Structure changes of tungsten heating filaments during CVD of diamond [J]. Materials Science and Engineering A, 2002,335 ( 1 -2) :236-245.
  • 9[9]Takahiro Tsutsumoto. Improvement of Ta filament for diamond CVD[J]. Thin Solid Films, 1998,317(1-2) :371-375.
  • 10[10]Matsubara H, Sakuma T. Diamond deposition on cemented carbide by chemical vapour deposition using a tantalum filament[J]. Journal of Materials Science, 1990,25: 4472-4476.

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