一种新型三维实体到标准工艺版图的转换方法

A Novel Transfer Method from 3D Model to 2D Mask Layout

研究了一种准标准格式的三维实体文件的结构,在此基础上提出了三维实体到标准工艺版图的转换方法,并采用VC++编程语言开发了相应的转换接口.最后通过典型MEMS器件——微机械加速度计进行了验证,结果表明这种转换方法是切实可行的.

Based on the study of the format of a sub-standard 3D solid model file（SAT format）, we presented a transfer method for the 3D solid models to standard CAD-layouts. The corresponding transfer interface was developed in VC＋ ＋ language. The validity of the transfer method was validated by using a kind of typical MEMS device-micro-machined accelerometer. The result showed that the transfer method is feasible.