物理气相沉积制备锂离子电池正极薄膜研究进展

Progress in Preparation of Thin Film Electrodes for Lithium Ion Batteries by Physical Vapor Deposition

薄膜锂离子电池是锂离子电池发展的最新领域,正极材料的薄膜化是薄膜锂离子电池的重要部分。综述了近年来国内外物理气相沉积在薄膜锂离子电池正极薄膜方面的研究新进展,着重介绍了射频磁控溅射、脉冲激光沉积、电子束沉积等制备技术的工作原理、特点及发展,并对这些制备技术在锂离子电池正极薄膜制备中的应用进行了分析、比较和评价。

With the innovation in micro devices over the last decade, there is a serious demand for thin film batteries. Therefore positive film is an important component of thin film lithium ion batteries. The new research progress for physical vapor deposition in positive film material in recent years is summarized. The characteristics and relative merits of these preparation methods, such as RF magnetron sputtering, pulsed laser deposition, and electron beam vapor deposition are analyzed and stressed, and the applications of these technologies for preparing positive film are compared, analyzed and evaluated.