MEMS薄膜吸合电压在线测试系统设计

Measurement System for In-Situ Extracting Pull-in Voltages of MEMS Thin Films

为了实现MEMS薄膜材料参数的在线测试,设计了MEMS薄膜吸合电压在线测试系统。该测试系统由测控软件、测试硬件平台与测试微结构构成,能够全自动地快速完成薄膜吸合电压的在线测试,并立即输出薄膜的杨氏模量与残余应力。测试系统最大可测试100V的吸合电压,测试精度为±1.0V。最后对由标准牺牲层加工工艺制作的多晶硅双端固支梁进行了测试实验,并给出了测试数据,实验结果表明本测试系统具有高精度、快速测试的优点,适合于工业生产的大批量测试需求。

A measurement system for in-situ extracting pull-in voltages of MEMS thin films is designed. The system consisting of application software for computing and control, hardware platform for testing and test microstructures, can automatically fast complete the in-situ extracting pull-in voltages of MEMS thin films and immediately obtain the Yang＇ s modulus and residual stress. The maximum tested pull-in voltage is 100 V and the precision is ± 1.0 V. The system is verified by testing the polysilicon doubly-clamped beam fabricated by standard sacrifice process. The results show the measurement system has the advantages of high precision and fast test, which is suitable for the volume-test of industry products.