摘要
在不同Xe气流量下测量了F-400/3500和F-250/1500分子泵对Xe气的抽速,指出分子泵对Xe气的抽速是其对N2抽速的0.6~0.8倍。这一折算系数和泵的型号有关,和泵口真空度也相关。
The Xe Pumping speed of F-250/1500/F-400/3500 molecular pump has been tested at different Xe flowrates. The result indicated that the Xe pumping speed of molecular pump is about 60%-80% of N2 pumping speed. Such a conversion rate bears relations to the model/type of pump and vacuum pressure at pump intake.
出处
《真空》
CAS
北大核心
2007年第2期15-17,共3页
Vacuum
关键词
分子泵
抽速
XE
molecular pump
pumping speed
Xe