基于四象限探测器的掩模版对准检测与控制

Measure and Control for IC Mask Alignment Based on Quadrant Detectors

提出一种基于可编程控制器和四象限探测器的集成电路掩模版对准系统.该系统采用两个四象限探测器构成对准检测装置,实现对掩模版对准误差的实时检测.通过合理选择对准检测装置的安装位置与姿态,实现对准误差与掩模版运动之间的解耦.对准过程中,根据检测到的对准误差,由可编程控制器对传输机械手的位置和姿态进行调整,从而改变掩模版相对于对准检测装置的位置和姿态.对准控制采用阶梯步长逐步逼近算法,并且引入了机械手姿态调整后的补偿控制,以提高对准效率.实验结果表明,该检测与控制系统工作安全可靠,对准速度快,精度高.

A measure and control system for Integrated circuit （IC） mask alignment based on Programmable Controller （PLC） and quadrant detectors is presented. The measure device consists of two quadrant detectors, which measure alignment errors in real-time. The alignment errors and the motions of IC mask can be decoupled via reasonably choosing the position and orientation of the measure device. Programmable controller is employed to adjust the manipulator＇s position and orientation in order to align the IC mask according to the alignment errors. Furthermore, a stepwise approach with varying step lengths, and a compensation strategy following the manipulator＇s rotation are introduced in the IC mask alignment. The experimental results verified the effectiviness of prooosed system and methods.