摘要
微能源具有体积小,重量轻等特点,是军民两用高新技术发展的迫切需求,已成为近年来MEMS领域的一个重要发展方向。微能源主要分为微型电池和微型发电机两大类。本文着重介绍基于MEMS技术的微型发电机的研究现状和通过振动实现能量转换的发电机系统及其电磁式、静电式和压电式三种主要实现方法,指出了微型发电机的发展趋势。
Micro power is an urgent demand in the field of both army and civil advanced technique development, it becomes the novel study field for MEMS. It has the characters of small volume, light weight, and so on. Micro power can be classified into two kinds： micro cell and micro generator. The current research status and the trend of the technology are introduced, and the vibration-based generator is focused by three ways including electromagnetism type, electrostatic type, and piezoelectricity out. The trend of the micro generator is pointed out.
出处
《微纳电子技术》
CAS
2007年第5期254-258,263,共6页
Micronanoelectronic Technology
基金
国家"863"资助项目(2005AA404280)
关键词
微机电系统
振动式发电机
电磁
静电
压电
MEMS
vibration-based generator
electromagnetism
electrostatic
piezoelectricity
