摘要
着重对太阳能电池制绒工艺的研究进行了阐述,并以研究所得的工艺数据为基础,对制绒设备的关键部件——工艺槽体的设计进行了详细说明,保证所研发的最终设备满足了大规模生产线对制绒设备的需要。
In this paper we mainly described solar cell＇s etching technique based on what we have achieved during the designing process of the wet benches＇ structure.
出处
《电子工业专用设备》
2007年第6期24-25,39,共3页
Equipment for Electronic Products Manufacturing
关键词
太阳电池
单晶硅
制绒
Solar cell
Monocrystalline
Etching
