计算全息图检测大口径凹非球面系统的研究

CGH testing for large concave surface

根据圆形计算全息图的衍射特性,将曲面圆形计算全息图与补偿镜相结合,应用于凹非球面折射式零检测光学系统中。与传统的折射式零检测光学系统相比,该系统不仅可以简化光学系统的装调过程,还可以降低计算全息图与补偿镜的制作精度,减少制作成本。阐述了利用曲面计算全息图衍射特性的折射式零检测光学系统检测凹非球面的基本原理,给出了具体的设计实例。对于口径为950mm的抛物面,检测结果P!V值为0.024λ。

For the large concave surface, the traditional testing method is null tests by using refractive compensator. However, not only it is difficult to align the optical elements of the system, but also it is expensive to fabricate them. In this paper the CGH fabricated on the compensator lens surface which is utilized in system to substitute the traditional compensator is discussed, and the practical optical parameters are given.For the sample surface with the aperture of 950 mm, testing result of P-V is 0.024h.