摘要
在分析聚酰亚胺薄膜反射镜面形成型理论的基础上,结合光学系统对反射镜面形的要求,用有限元法求解了薄膜反射镜在一定预应力存在的条件下,受均布载荷作用产生变形的数值解,通过数据拟和给出了反射镜面形,并计算了理论面形与计算面形的误差;以反射镜镜面不同区域施加的载荷为设计变量,薄膜的屈服强度为状态变量,理想面形与计算面形的误差为目标函数,用ANSYS软件对薄膜反射镜面形进行了优化;最后以Zernike多项式为接口对反射镜面形进行了波前拟合,给出了优化前后反射镜的像差,证明了通过对薄膜反射镜施加适当的力场可以得到面形精度很好的抛物线面形。结果表明:改变力场可以控制薄膜反射镜面形,并得到需要的面形,为实际设计、构建聚酰亚胺薄膜反射镜提供了理论基础、设计依据和方法。
On analysis of the mechanics theory of polyimide membrane mirror, a numerical solution of membrane reflector on the equispaced load and proper pre-stressing force is computed, and the error between ideal surface and computed surface is given. Taking surface load on different areas of the mir ror as design variable, yield strength of the membrane as state variable and mean square root of the error between ideal surface and computed surface as target function, the surface shape of membrane mirror is optimized with ANSYS software. Finally, the wavefront of the mirror before and after optimization is calculated using Zernike polynomial fitting, and aberration of the mirror is presented. The results show that the shape of high accuracy parabolic membrane mirror can be obtained applying appropriate loads on different areas of the membrane mirror.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第6期818-823,共6页
Optics and Precision Engineering
基金
国家自然科学基金资助项目(No.60575025)
关键词
薄膜反射镜
优化设计
有限元法
ZERNIKE多项式
membrane mirror
optimal design
finite element method
Zernike polynomial
optimiza tion
