摘要
用退火法在玻璃、硅片衬底上先生长ZnO籽晶,然后在90℃下在醋酸锌和六亚甲基四胺溶液中生长了直径约为17 nm的ZnO纳米棒。采用X射线衍射仪(XRD)分析了不同衬底上生长的ZnO纳米棒的结构和择优生长取向,用扫描电子显微镜(SEM)观察了ZnO的形态,用荧光光谱仪分析了纳米棒的发光特性,讨论了籽晶、衬底类型和衬底放置方式对纳米棒的尺寸、排列趋向性和光学性能的影响。纳米棒的直径和排列依赖于衬底的初始状态,籽晶可以减小纳米棒的尺寸,增强纳米棒的排列有序性;一旦衬底上生长了籽晶,后续生长的纳米棒的尺寸、排列和性能与衬底的类型无关,纳米棒都具有强的紫光发射。但衬底的放置方式会影响其上纳米棒的形态,竖直放置的衬底易生长尺寸分布均匀的准有序排列的纳米棒。
ZnO nanorods of average diameter 17 nm were fabricated in solution of zinc acetate and hexamethylene tetramine on glass and Si substrates with ZnO seeds preformed by annealing method. The nanorod structure, morphology and preferential ordered array were characterized by X-ray diffraction (XRD) and scan electron microscope (SEM). Emission of the nanorods was measured by photoluminescence (PL) spectroscopy. Influences of seeds, substrates and substrate placed style on nanorod diameter, preferential ordered array and photoluminescence properties were studied. The nanorod diameters were dependent on the initial state of substrates, and seeds preformed could decrease the rod diameter dramatically and improve the ordered arrangement, but the nanorod properties were independent on the type of substrates once ZnO seeds were preformed on the substrates, and the nanorods had strong UV emission. The nanorod morphology and array would be affected by the placed style of the substrates. The nanorods grown on the upright placed substrate show smaller diameter and better uniformity and ordering.
出处
《半导体技术》
CAS
CSCD
北大核心
2007年第8期677-681,共5页
Semiconductor Technology
基金
国家自然科学基金资助项目(10574011)