激光扫描共聚焦显微镜中云纹法的实验研究

Experimental Study of Moiré Fringes in Laser Scanning Confocal Microscopy

将激光扫描共聚焦显微镜与实验力学中的云纹法相结合,提出了激光扫描共聚焦显微镜云纹法并对其进行了实验研究.实验中以激光扫描共聚焦显微镜的扫描线作为虚拟参考栅,以1200 lines/mm的全息光栅作为试件栅,这两组栅线相干涉形成云纹条纹.对激光扫描共聚焦显微镜中云纹的形成原理和出现条件进行了讨论,对实验结果与理论分析进行了比较.结果表明,激光扫描共聚焦显微镜云纹法是真实可行的.由于该方法无需干涉系统且对测量环境无特殊要求,因此有望在待测物体表面微米量级变形观察和测量上得到应用.

In combination of Laser Scanning Confocal Microscopy（LSCM）and the moiré method,a new LSCM moiré method was developed and investigated by experiment in this paper.The moiré patterns were formed by the overlap of 1 200 lines/mm specimen grating and the scanning lines of LSCM.The principle and condition of forming LSCM moiré were described in detail.The measured parameters of moiré fringes form experimental images in LSCM agree well with theoretical calculations.The experimental results verify the feasibility of the proposed moiré method to be another effective technique for measuring in-plane deformation at micrometer scale.