离子束辅助沉积TiN／Ag多层膜的抗菌性和抗腐蚀性

Antibacterial and corrosion resistance of TiN/Ag multilayers by ion beam assisted deposition

用离子束辅助沉积(IBAD)方法在医用不锈钢317L上制备TiN/Ag多层膜。用琼脂平板法测试了样品的抗菌率,测试菌种为革兰氏阴性大肠杆菌(E.coil)和革兰氏阳性金黄色葡萄球菌(S.aureus);用电化学腐蚀的方法检测了薄膜在Hank’s模拟体液中的耐腐蚀性能;通过X射线光电子能谱(XPS)、X射线衍射(XRD)和俄歇电子能谱(AES)分析研究了薄膜的结构特征和各元素的深度分布。研究结果表明:当多层膜TiN/Ag的调制周期为8 nm时(5 nm TiN+3 nm Ag),表现出很强的抗菌性,抗菌率达到99%以上;而且抗腐蚀性能比医用不锈钢317L有所提高,接近单层TiN薄膜。

TiN/Ag multilayers were deposited on medical stainless steel 317L by ion beam assisted deposition （IBAD）. Standard agar dilution method was used to test antibacterial ratio using E.coil and S.aureus. Electro-chemical method was used to test corrosion resistance of the film in Hank＇s simulated human plasma. The structure and depth profile of the elements were investigated by XPS, XRD and AES. The results show that a strong antibacterial ratio （〉99%） can be obtained when the modulation period of TiN/Ag multilayers is 8 nm （5 nm TiN and 3 nm Ag）. Its corrosion resistance is better than medical stainless steel 317L, approaching monolayer TiN.