摘要
介绍了MKS压力控制系统的组成、651C控制器的通信命令参数、串行通信协议宏的构造方法。
The composition of MKS pressure control system, the communication commands and parameters of 651C controller and the method on building serial communication protocol macro are all introduced.
出处
《电子工业专用设备》
2008年第1期38-41,共4页
Equipment for Electronic Products Manufacturing
关键词
MOCVD
PLC
串行通信
协议宏
闭环控制
编程
MOCVD： PLC
serial communication
protocol macro
closed-loop control
programming
