摘要
波导隔离球用Ce:YIG磁光薄膜可由溅射外延或溅射波积后热处理结晶化两种方法制各.探讨了制备过程中不同工艺条件对薄膜结晶性能及磁光特性的影响。
The Ce:YIG magneto-optic fi1ms for waveguide isolater can be prepared by sputtering epitaxial method or by recrystallitation -annealing after RF-s puttering deposition. The effect of different thechnica1 conditions during the preparation on the crystallisation and magneto- optic perproties of the films is discussed.
出处
《磁性材料及器件》
CAS
CSCD
1997年第4期8-10,共3页
Journal of Magnetic Materials and Devices
基金
国家自然科学基金!69401004
关键词
溅射
铈
YIG
磁光薄膜
波导隔离器
sputtering, Ce :YIG, Faraday rotation, absorption coefficient, waveguide isolater