摘要
在光刻热熔成型以及电铸复制得到的柱面微透镜阵列镍模板基础上,采用铸塑工艺得到了高质量的PMMA柱面微透镜阵列。本文介绍了静态铸塑的模具设计、工艺过程、参数控制及测试分析。对柱面微透镜阵列的表面形貌分析表明,铸塑复制的面形误差小于0.5μm.
On the basis of Nickel mould plate fabricated by melting photoresist and elec-troforming PMMA cylindrical microlens arrays are fabricated by the replication technology of static casting plastic. This paper discribes the mould of casting,the technological routine and parameters. The replication error is less than 0. 5μm according to measurements of surface profiles.
出处
《光学仪器》
1998年第2期36-39,共4页
Optical Instruments
关键词
微透镜阵列
微光学
铸塑
复制
Microlens Array, Micro Optics,Casting Plastic,Replication