双线性振动微陀螺特征频率光学测试和有限元分析

OPTICAL TESTING AND FINITE ELEMENT ANALYSIS OF EIGENFRE-QUENCY IN THE DOUBLE LINEAR VIBRATORY MICRO-GYROSCOPE

微机械陀螺仪特征频率的研究对其设计至关重要。该文运用高速图像采集技术、显微技术和数字图像相关方法,实测了一组微陀螺的固有频率。该测试方法非接触无损测量,测试结构简单,测量精度高。测试结果与有限元计算结果一致,验证了有限元分析方法用于微机械系统的可行性和有效性。对比结果表明,所建立的有限元模型合理,分析结果可靠。最后,利用有限元数值模拟技术研究了微陀螺结构尺寸对特征频率的影响,其分析结果对微陀螺仪的设计具有指导性意义。

Study of eigenfrequency is key to the design of the micromechanical gyroscope. A series of micro-gyroscopes are tested by the use of high-speed camera, microscope and digital image correlation technique. The presented optical testing method is simple to set up, and has a high accuracy. The testing results agree well with those of the finite element method, showing that it is reliable and practical to use the finite element modal for micro electro-mechanical system analysis. Using the finite element method, the effects of structural size of micro-gyroscope on its natural frequency are investigated, which can help the design of micro-gyroscope.