真空微电子触觉传感器场致发射阵列的研究

Study on Field Emission Array Integrated Vacuum Micro Electron Tactile Sensor

阐述了真空微电子触觉传感器的工作原理。采用半导体集成电路加工技术和硅微各向异性腐蚀及氧化锐化工艺，在电阻率为３～５Ω·ｃｍ的ｎ型（１００）硅片上制备了真空微电子触觉传感器的场致发射阴极锥尖阵列，锥尖密度达３９００个／ｍｍ２，起始发射电压为２～３Ｖ，反向击穿电压大于３０Ｖ，收集极在２０Ｖ在电压时，单尖发射电流达０．２μＡ，实验结果表明这种真空微电子触觉传感器具有良好的触觉效应。

This paper describes principle of vacuum micro electron tactiles sensor.The silicon tips field emission array have been fabricated by using anisotripic etching and oxidation sharpening on the Si(100) substrate (n type,P=3～5 Ω·cm).The density of tips is up to 3900 tips/mm 2,and the starting emission voltage is 2～3 V,emission current is 0.2 μA at anode voltage of 20 V,and the backward breakdown voltage is 30 V.The experimental results show that the sensor has good tactile effect.