摘要
分析了现有的MEMS系统级建模与仿真方法,讨论了运用Modelica语言进行面向对象的非因果关系建模方法,建立了基于Modelica的电容式微型静电致动器系统级模型,仿真结果证明了Modelica用于MEMS系统级多领域仿真的可行性。
The existed methods for the system level modeling and simulation of MEMS are analysed and methods of object-oriented and non-causal modeling with Modelica are discussed. The system level model of capacitive electrostatic microactuator based on Modelica is established and simulating results shows that Modelica can be effectively applied to the multi-domain modeling and the simulation of MEMS.
出处
《传感技术学报》
CAS
CSCD
北大核心
2009年第10期1413-1416,共4页
Chinese Journal of Sensors and Actuators
