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化学法镀膜的过程控制研究

Study of Process Control on Sol-gel derived optical thin films
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摘要 溶胶-凝胶法制备的光学薄膜具有优良的物理化学特性和广阔的应用前景。本文对化学法镀膜中的溶胶制备﹑溶胶保存﹑薄膜制备三个阶段进行了研究,利用透射电镜﹑激光粒度仪﹑红外光谱仪﹑原子力显微镜﹑椭偏仪等仪器对溶胶和薄膜的特性进行检测,对其进行过程控制,其结果对于制备出性能良好的薄膜材料及其产业化应用具有一定的指导意义。 Sol-gel derived optical thin films had good physics and chemical characters and wide applications.The three steps, Sol prepared, Sol preserved and Film made were studied in this paper.Sol and thin films were characterized by TEM, LPSA, FTIR, AFM,ellipsometer respectively.The results will be useful in the industrialization of the perfect film material.
作者 王珊
出处 《科技资讯》 2009年第33期92-93,共2页 Science & Technology Information
关键词 溶胶凝胶 镀膜 过程控制 Sol-Gel Process Coating Process Control
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