Ba_(1-x)Sr_xTiO_3薄膜的制备及特性研究

Investigation on Characters and Preparation of Ba_(1-x)Sr_x TiO_3 Thin Films

用溶胶-凝胶方法制备Ba1-xSrxTiO3（BST）薄膜材料，研究薄膜的结构和电性能。用XDR及SEM分析了沉积在硅片上的BST薄膜的结构，测试了在空温下BST薄膜的电滞回线及介电特性。

Ba1-xSrx Tio3 (BST) thin films were prepared by Sol-gel method. The structure and electric properties of BST thin films were studied. The crystallographic structure of BST films deposited on Si substracts was examined by the XRD and SEM method. Ferroelectric hysteresis curves and dielectric properties of BST thin films could be measured at room temperature.