摘要
本文主要介绍10-10Pa溅射离子泵的研制,提高极限真空和抽气速率的方法。
AbstractThis article mainly introduces the research on sputter ion pump with 1010 Pa ultimate vacuum and the means of improving ultimate vacuum and pumping speed.
出处
《真空》
CAS
北大核心
1998年第3期11-15,共5页
Vacuum